Methods for processing substrates

ABSTRACT

A method for processing substrates includes providing a bonding layer between a substrate and a carrier to bond the substrate to the carrier, processing the substrate while the substrate is supported by the carrier, and removing the bonding layer to separate the substrate from the carrier. The bonding layer may include a thermosetting release layer and thermosetting glue layers, wherein at least one of the thermosetting glue layers is provided on each side of the thermosetting release layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a Continuation of prior application Ser. No.14/147,718, filed on Jan. 6, 2014 in the United States Patent andTrademark Office, which claims the benefit of priority under 35 U.S.C.§119 to Korean Patent Application 10-2013-0008692, filed on Jan. 25,2013, the content of which is incorporated herein in its entirety byreference.

BACKGROUND

1. Field

An embodiment of the present inventive concept relates to methods ofprocessing substrates and, more particularly, to methods of thinningwafers.

2. Description of the Related Art

In manufacturing semiconductor process, a wafer is bonded to a carrierwith glue and release layers therebetween in order to thin the wafer bya back lap process. An ultraviolet (UV) curable adhesive is generallyused as the glue layer. UV radiation is applied to the glue layer inorder to use the UV curable adhesive, but the wafer can be damaged fromthe UV radiation. If a thermoplastic adhesive is adopted as the gluelayer, a high temperature process cannot be applied due to poor thermalstability. Therefore, there is a need for a method of stably bonding awafer to a carrier without damage to the wafer even when using a hightemperature process.

SUMMARY

The present inventive concept provides a method for processing asubstrate in which a carrier can be bonded to a wafer with thermalstability.

The present inventive concept also provides a method for processing awafer in which a carrier can be easily separated from the wafer.

Additional features and utilities of the present general inventiveconcept will be set forth in part in the description which follows and,in part, will be obvious from the description, or may be learned bypractice of the general inventive concept.

An embodiment of the present inventive concept is directed to a methodfor processing a substrate comprising providing a bonding layer betweena substrate and a carrier to bond the substrate to the carrier,processing the substrate while the substrate is supported by thecarrier, and removing the bonding layer to separate the substrate fromthe carrier, wherein the bonding layer may include a thermosettingrelease layer and thermosetting glue layers, and wherein at least one ofthe thermosetting glue layers is provided on each side of thethermosetting release layer.

In an example embodiment, a bonding force between the thermosettingrelease layer and one of the thermosetting glue layers may be less thana bonding force between one of the thermosetting glue layers and one ofthe substrate and the carrier.

In an embodiment, the thermosetting glue layers may comprise a firstglue layer provided between the thermosetting release layer and thesubstrate and a second glue layer provided between the thermosettingrelease layer and the carrier.

In an embodiment, providing the bonding layer may comprise providing afirst thermosetting material on the substrate to form the first gluelayer, providing a second thermosetting material on the first glue layerto form the release layer, and providing a third thermosetting materialon at least one of the release layer and the carrier to form the secondglue layer.

In an embodiment, providing the first thermosetting material on thesubstrate to form the first glue layer may comprise coating at least oneof siloxane and a thermosetting material that includes the siloxane onthe substrate.

In an embodiment, providing the second thermosetting material on thefirst glue layer to form the release layer may comprise coating aprecursor that includes at least one of polydimethylsiloxane (PDMS) andhexamethyldisiloxane (HMDSO) on the first glue layer and performing achemical vapor deposition process using the hexamethyldisiloxane (HMDSO)as a reaction gas.

In an embodiment, providing the third thermosetting material on at leastone of the release layer and the carrier to form the second glue layermay comprise coating at least one of siloxane and a thermosettingmaterial that includes the siloxane on at least one of the release layerand the carrier.

In an embodiment, providing the bonding layer may further comprisestrengthening the first and second glue layers and the release layer.

In an embodiment, removing the bonding layer to separate the substratefrom the carrier may comprise detaching the carrier and the second gluelayer from the release layer and cleaning the substrate.

In an embodiment, cleaning the substrate may comprise providing acleaning solution on the substrate to remove the first glue layer whilethe release layer remains on the substrate, wherein the cleaningsolution may include acetate mixed with at least one ofdiazabicycloundecene (DBU) and tetra-n-butylammonium fluoride (TBAF).

In an embodiment, providing the bonding layer may comprise providing afirst thermosetting material on the substrate to form the first gluelayer, providing a second thermosetting material on the first glue layerto form the release layer, patterning the release layer to expose anedge of the first glue layer located at an edge of the substrate, andproviding a third thermosetting material on at least one of the firstglue layer and the carrier to form the second glue layer, wherein thesecond glue layer may contact the the edge of the first glue layer.

Another embodiment of the present inventive concept is directed to amethod for processing a substrate comprising sequentially forming afirst thermosetting glue layer and a thermosetting release layer on asubstrate, providing a second thermosetting glue layer to the releaselayer between the substrate and a carrier to bond the substrate to thecarrier, thinning the substrate while the substrate is supported by thecarrier to produce a thinned substrate, separating the carrier and thesecond glue layer from the release layer, and cleaning the thinnedsubstrate to remove the release layer and the first glue layer from thethinned substrate.

In an embodiment, thinning the substrate may comprise forming at leastone recess on a first surface of the substrate, wherein the firstsurface may be opposite to a second surface on which the first gluelayer is formed, and wherein at least one through electrode included inthe substrate may be exposed through the recessed second surface of thethinned substrate.

In an embodiment, the release layer may comprise at least one ofpolydimethylsiloxane (PDMS) and hexamethyldisiloxane (HMDSO), andwherein the first and second glue layers may comprise siloxane.

In an embodiment, the substrate may comprise a semiconductor waferincluding a plurality of bumps and a plurality of through electrodeselectrically connected to the plurality of bumps, and wherein thecarrier may comprise one of a glass substrate and a material identicalto that of the substrate.

In an embodiment, an integrated circuit chip may be formed using themethod.

Another embodiment of the present inventive concept is directed to amethod for processing a substrate comprising forming a firstthermosetting glue layer on the substrate and a first thermosettingrelease layer on the first thermosetting glue layer, forming a secondthermosetting glue layer on a carrier, bonding the substrate to thecarrier, processing the substrate while the substrate is supported bythe carrier, and removing the carrier from the substrate.

In an embodiment, the forming the second thermosetting glue layer on thecarrier may comprise forming a first portion of the second thermosettingglue layer on the carrier and forming a second portion of the secondthermosetting glue layer on the first thermosetting release layer.

In an embodiment, the method may further comprise forming a secondthermosetting release layer on the first portion of the secondthermosetting glue layer on the carrier.

In an embodiment, the removing the substrate from the carrier maycomprise causing a crack to propagate through the second thermosettingrelease layer.

BRIEF DESCRIPTION OF THE DRAWINGS

These and/or other features and utilities of of the present generalinventive concept will become apparent and more readily appreciated fromthe following description of the embodiments, taken in conjunction withthe accompanying drawings of which:

FIGS. 1A to 1K are cross sectional views illustrating an example of amethod for processing a substrate, according to an embodiment of thepresent inventive concept;

FIG. 1D is a cross sectional view illustrating a modified example ofFIG. 10;

FIG. 1E is a cross sectional view illustrating another modified exampleof FIG. 10;

FIG. 1F is a cross sectional view illustrating an example of a portionof FIG. 10;

FIG. 1G is a cross sectional view illustrating a modified example ofFIG. 1F;

FIG. 1L is a cross sectional view illustrating an example of a method offabricating a semiconductor chip using the method for processing asubstrate, according to an embodiment of the present inventive concept;

FIG. 1M is a cross sectional view illustrating an example of a method offabricating a semiconductor package using the method for processing asubstrate, according to an embodiment of the present inventive concept;

FIGS. 2A to 2F are cross sectional views illustrating an example of amethod for processing a substrate according to an embodiment of thepresent inventive concept;

FIG. 2F is an enlarged view illustrating an example of a portion of FIG.2E;

FIG. 3A to 3I are cross sectional views illustrating an example of amethod for processing a substrate according to an embodiment of thepresent inventive concept;

FIG. 3C is a cross sectional view illustrating an example of a portionof FIG. 3B;

FIG. 3F is a cross sectional view illustrating a modified example ofFIG. 3E;

FIG. 4A is a schematic block diagram illustrating an example of memorycards including at least one semiconductor apparatus, according to anembodiment of the present inventive concept; and

FIG. 4B is a schematic block diagram illustrating an example of aninformation process system including at least one semiconductorapparatus, according to an embodiment of the present inventive concept.

DETAILED DESCRIPTION OF THE EMBODIMENTS

Reference will now be made in detail to the embodiments of the presentgeneral inventive concept, examples of which are illustrated in theaccompanying drawings. Example embodiments, may, however, be embodied inmany different forms and should not be construed as being limited to theembodiments set forth herein; rather, these example embodiments areprovided so that this disclosure will be thorough and complete, and willfully convey the scope of example embodiments of the inventive conceptto those of ordinary skill in the art. In the drawings, the thicknessesof layers and regions are exaggerated for clarity. Like referencenumerals in the drawings refer to the like elements throughout. Theembodiments are described below in order to explain the present generalinventive concept while referring to the figures.

FIGS. 1A to 1K are cross sectional views illustrating an example of amethod for processing a substrate, according to an embodiment of thepresent inventive concept. FIG. 1D is a cross sectional viewillustrating a modified example of FIG. 10. FIG. 1E is a cross sectionalview illustrating another modified example of FIG. 10. FIG. 1F is across sectional view illustrating an example of a portion of FIG. 10.FIG. 1G is a cross sectional view illustrating a modified example ofFIG. 1F.

Referring to FIG. 1A, a substrate 100 may be provided. The substrate 100may be a wafer level semiconductor substrate such as silicon wafer. Thesubstrate 100 may be referred to as a wafer 100 hereinafter. The wafer100 may comprise an upper surface 100 a, at which an integrated circuit105 is formed, and a lower surface 100 b opposite the upper surface 100a. The integrated circuit 105 may comprise a memory circuit, a logiccircuit, or a combination thereof. The wafer 100 may comprise aplurality of through electrodes 111, which extend in a thicknessdirection and have lengths that partially penetrate the wafer 100. Aplurality of bumps 113 may be provided on the upper surface 100 a of thewafer 100. The bumps 113 may be electrically connected to the pluralityof through electrodes 111.

Referring to FIG. 1B, a first glue layer 251, a release layer 210, and asecond glue layer 252 may be sequentially formed on the upper surface100 a of the wafer 100. Each of the release layer 210 and the first andsecond glue layers 251 and 252 may comprise, for example, athermosetting material. According to an embodiment, the first glue layer251 may be formed by coating a thermosetting resin, such as, forexample, silicone (identified by a chemical structure described below),a material comprising silicone, or a siloxane-based material, on theupper surface 100 a of the wafer 100. Alternatively, the first gluelayer 251 may be formed, for example, from tripropylenemelamine (TMAT)or any material that includes TMAT.

Depending on the adjusted viscosity of the first glue layer 251, thefirst glue layer 251 may fill spaces between the adjacent bumps 113 andmay not cover the bumps 113, or the first glue layer 251 may be formedto cover the bumps 113.

The release layer 210 may be formed by a chemical vapor depositionprocess using a material that includes, for example, silicone (e.g.,polydimethylsiloxane (PDMS), hexamethyldisiloxane (HMDSO), or acombination thereof) as a precursor, and HDMSO as a source.

For example, the release layer 210 may be formed by spin coating aprecursor that includes, for example, PDMS as a main material and aliquid HMDSO as a solvent with a ratio from about 1:50 to about 1:200(i.e., PDMS:HMDSO=1:50 to 1:200) on the first glue layer 251, and thenperforming a plasma enhanced chemical vapor deposition (PECVD) processusing, for example, a gaseous HMDSO as a source.

The spin coating may be performed for several tens of seconds (e.g.,about 20 seconds). The PECVD may be performed under conditions thatinclude a radio frequency (RF) power of about tens of watts (e.g., about40 W), a chamber pressure of about tens of mTorr (e.g., about 40 mTorr),a plasma time of about several tens of seconds to minutes (e.g., about65 seconds), and an HMDSO gas flow rate of about tens of sccm (e.g.,about 15 sccm). The release layer 210 may cover the bumps 113 and maycause the first glue layer 251 to have a curved shape that extends alongthe bumps 113.

As described later in FIG. 1J, a thickness Tr (shown in FIG. 1F) of therelease layer 210 may be inversely proportional to a force required todetach the second glue layer 252. In other words, the greater thethickness Tr of the release layer 210, the lower the force to separatethe second glue layer 252. The thickness Tr of the release layer 210 maydepend on the conditions of the spin coating and the PECVD processes.

In the spin coating process, if the ratio of PDMS to HMDSO increases(i.e., the HMDSO content increases) and the coating speed decreases(i.e., spin speed decreases), the thickness Tr of the release layer 210may increase.

In the PECVD process, if the RF power is greater, the chamber pressureis lower, and the plasma time (i.e., process time) is longer, thedeposition rate may increase so that the thickness Tr of the releaselayer 210 may increase.

The release layer 210 may become stronger or harder if the plasmaintensity increases and the plasma time becomes longer. Alternatively,the release layer 210 may become weaker or softer if the plasmaintensity decreases and the plasma time becomes shorter. If the releaselayer 210 is too strong or hard, the release layer 210 may bedelaminated and/or cracks may occur. If the release layer 210 is tooweak or soft, the release layer 210 may remain in a liquid state and beeasily wiped off. Under the plasma deposition conditions describedabove, the release layer 210 may have a stable structure identical oranalogous to a fully cross-linked structure.

The second glue layer 252 may be formed by coating a material identicalor analogous to that of the first glue layer 251. For example, amaterial that includes silicone or a siloxane-based material may becoated on the release layer 210 to form the second glue layer 252. Thesecond glue layer 252 may have a curved shape that extends along thebumps 113. Alternatively, the second glue layer 252 may be formed, forexample, from tripropylenemelamine (TMAT) or any material that includesTMAT.

Referring to FIG. 10, a carrier 300 may be bonded to the wafer 100. Thecarrier 300 may be, for example, a silicon substrate having a size andmaterial identical or analogous to those of the wafer 100.Alternatively, the carrier 300 may be, for example, a transparentsubstrate such as a glass substrate. The carrier 300 may comprise anupper surface 300 a and a lower surface 300 b opposite the upper surface300 a. The carrier 300 may be bonded to the wafer 100 so that the uppersurface 300 a may face the upper surface 100 a of the wafer 100.Optionally, the first and second glue layers 251 and 252 and the releaselayer 210 may be strengthened by applying heat to improve theheat-resistance and/or adhesion properties.

The wafer 100 may be first baked in a deposition chamber at a lowtemperature that is insufficient to strengthen the glue layers 251 and252 and the release layer 210, and thereafter the wafer 100 may besecond baked in a bake chamber at a high temperature sufficient tostrengthen the glue layers 251 and 252 and the release layer 210. Thefirst and second baking processes may be performed for several tens ofminutes. For example, the first baking process may be performed at atemperature from about 100° C. to about 180° C. from about 5 minutes toabout 15 minutes, and the second baking process may be performed at atemperature from about 150° C. to about 250° C. from about 5 minutes toabout 15 minutes.

Alternatively, as illustrated in FIG. 1D, the second glue layer 252 maybe formed on the carrier 300. For example, the first glue layer 251 andthe release layer 210 may be sequentially formed on the upper surface100 a of the wafer 100, and the second glue layer 252 may be formed onthe upper surface 300 a of the carrier 300.

As another embodiment, as illustrated in FIG. 1E, a first sub-glue layer252 a and a second sub-glue layer 252 b may be formed on the wafer 100and the carrier 300, respectively. For example, the first glue layer 251and the release layer 210 and the first sub-glue layer 252 a may besequentially formed on the upper surface 100 a of the wafer 100, and thesecond sub-glue layer 252 b may be formed on the upper surface 300 a ofthe carrier 300. When the wafer 100 and the carrier 300 are bondedtogether, the first sub-glue layer 252 a and the second sub-glue layer252 b may be bonded together to form the second glue layer 252.

Referring to FIG. 1F, the first glue layer 251 and the second glue layer252 may comprise a glue layer 250, and the release layer 210 may beembedded within the glue layer 250. The glue layer 250 and the releaselayer 210 may comprise a bonding layer 200, which may attach the wafer100 to the carrier 300.

The first glue layer 251 may fill spaces between adjacent bumps 113. Thefirst glue layer 251 may have a thickness Tg1 that is less than a heightHb of the bump 113. The first glue layer 251 may have an inclinedsurface 210 s having an upward slope from the upper surface 100 a of thewafer 100 towards the bump 113. For example, the first glue layer 251may have the thickness Tg1 (referred to as a first thicknesshereinafter) from about 30% to about 50% of the height Hb of the bump113. Depending on the viscosity of the first glue layer 251, the firstglue layer 251 may have a shape that wraps around the bumps 113, asillustrated in FIG. 1G, or the first glue layer 251 may cover the bumps113.

The release layer 210 may have a shape that curves along the profile ofthe bumps 113 and have a thickness Tr that is less than the that of thefirst glue layer 251. The second glue layer 252 may have a shape thatextends along the upper surface 100 a of the wafer 100 and curves alongthe profile of the bumps 113.

A thickness Tg2 (referred to as a second thickness hereinafter) of thesecond glue layer 252 may be the same as or greater than the firstthickness Tg1. The sum of the first and second thicknesses Tg1 and Tg2may be substantially the same as a distance between the wafer 100 andthe carrier 300, i.e., the thickness Tg of the glue layer 250.

The thickness Tr of the release layer 210 may be less than the thicknessTg of the glue layer 250. For example, the thickness Tg of the gluelayer 250 may be about 70 μm to about 120 μm, and the thickness Tr ofthe release layer 210 may be from about 200 nm to about 220 nm.

A surface topology or roughness may be found on the upper surface 100 aof the wafer 100 because the wafer 100 may have the bumps 113 formedthereon. The upper surface 300 a of the carrier 300 may be smoother orflatter than the upper surface 100 a of the wafer 100. Due to thesurface topology or roughness, a bonding force (or bonding strength)between the wafer 100 and the glue layer 250 may be stronger than abonding force (or bonding strength) between the carrier 300 and the gluelayer 250. The spherically shaped bumps 113 may make the bonding forcebetween the wafer 100 and the glue layer 250 stronger.

A bonding force between the release layer 210 and the glue layer 250 maybe weaker than the bonding forces between the wafer 100 and the gluelayer 250 and between the carrier 300 and the glue layer 250. Asdescribed above, the release layer 210 may provide a relatively weakerbonding strength at an inside of the bonding layer 200 so that thecarrier 300 may be more easily separated from the wafer 100.

Referring to FIG. 1H, the wafer 100 may be back-lapped. According tosome embodiments, the wafer 100 may be supported by the carrier 300 andmay be thinned by performing, for example, at least one of one of achemical and/or mechanical polishing, a wet etching, a dry etching, aspin etching, a grinding, and so forth one time or several times untilthe through electrodes 111 are exposed.

For example, a chemical and/or mechanical polishing process may beperformed on the lower surface 100 b of the wafer 100 to remove wafermaterial until at least a second lower surface 100 c is reached, a levelat which the through electrodes 111 are not exposed. A dry etchingprocess, for example, may then be performed on the second lower surface100 c to remove wafer material until at least a third surface 100 d isreached, a level at which the through electrodes 111 are exposed.Alternatively, the through electrodes 111 may be exposed by formingrecesses in the lower surface 100 b of the wafer 100 using a singleprocess such as, for example, chemical and/or mechanical polishing toremove wafer material until the third lower surface 100 d is reached. Insome embodiments, the upper surface 100 a of the wafer 100 may bereferred to as an ‘active surface 100 a’, and the third surface 100 d ofthe wafer 100 may be referred to as a ‘non-active surface 100 d’.

The wafer 100 may be thinned by the back-lap process from a firstthickness Tw1 to a second thickness Tw2. For example, the firstthickness Tw1 may be about several hundreds of micrometers and thesecond thickness Tw2 may be about several tens of nanometers. Thethinned wafer 100 may be difficult to handle, but the carrier 300 maymake handling the wafer 100 easier.

Referring to FIG. 1I, a lower insulation layer 107 may be formed tocover the non-active surface 100 d of the wafer 100, and a plurality ofpads 115 may be formed on the lower insulation layer 107 to beelectrically connected to the through electrodes 111. For example, aninsulator may be first deposited on the non-active surface 100 d tocover the through electrodes 111 and then planarized to expose thethrough electrodes 111 and form the lower insulation layer 107. Then, aconductor may be deposited on the lower insulation layer 107 andpatterned to form the pads 115 that are electrically connected to thethrough electrodes 111.

According to an embodiment, a high temperature may be necessary toperform the wafer thinning process of FIG. 1H and/or the postfabrication process of FIG. 1I. Compared with the case in which at leastone of the glue and release layers includes a thermoplastic material,the thermosetting release layer 210 and the first and secondthermosetting glue layers 251 and 252 may be more stable during a hightemperature process. Therefore, it may be possible to maintain a stablebonding between the wafer 100 and the carrier 300 during a hightemperature process.

Referring to FIG. 1J, the carrier 300 may be separated from the wafer100. For example, the carrier 300 may be detached by a clamping toolcapable of grasping an end of the carrier 300. Because the bonding forcebetween the glue layer 250 and the release layer 210 is stronger thanthe bonding forces between the wafer 100 and the first glue layer 251and between the carrier 300 and the second glue layer 252, the carrier300 may be relatively easily separated from the wafer 100. Afterseparation of the carrier 300, the release layer 210 and the second gluelayer 252 may remain on the wafer 100. Alternatively, a portion 210 a ofthe release layer 210 may be detached from the wafer 100 along with thecarrier 300. Optionally, protection tape 500 may be attached to thenon-active surface 100 d of the wafer 100 and a holder 510 may be usedto hold the wafer 100 stable when the carrier 300 is separated from thewafer 100.

According to an embodiment, as illustrated in FIG. 1F, because the firstglue layer 251 wraps around a lower portion of the bumps 113, the bumps113 may not suffer from interlocking when the carrier 300 is separatedfrom the wafer 100. In other words, because the first glue layer 251 mayreduce the surface topology or roughness of the upper surface 100 a ofthe wafer 100, there may be no interlocking of the bumps 113 during theseparation of the carrier 300. Consequently, regardless of the height Hband/or the distribution density of the bumps 113, the bumps 113 may befree from breakage and/or separation from the wafer 100 that mightotherwise occur if the bumps 113 interlocked.

Referring to FIG. 1K, the wafer 100 may be cleaned. The wafer cleaningprocess may remove the release layer 210 and the first glue layer 251.For example, a cleaning solution may be sprayed onto the wafer 100through a sprayer 700 to remove the release layer 210 and the first gluelayer 251. The cleaning solution may comprise, for example, at least oneof diazabicycloundecene (DBU) and tetra-n-butylammonium fluoride (TBAF)that is mixed with a solvent, such as acetate. The above mentionedprocesses may fabricate a thinned wafer 100 that includes the throughelectrodes 111. The thinned wafer 100 may be packaged through processesthat will be described later.

FIG. 1L is a cross sectional view illustrating an example of a method offabricating a semiconductor chip using the method for processing asubstrate, according to an embodiment of the present inventive concept.FIG. 1M is a cross sectional view illustrating an example of a method offabricating a semiconductor package using the method for processing asubstrate, according to an embodiment of the present inventive concept.

Referring to FIG. 1L, the wafer 100 may be divided into a plurality ofsemiconductor chips 10 by a wafer sawing process. The wafer sawingprocess may be performed to cut the wafer 100 along a scribe lane usinga cutting wheel 800 so that the wafer 100 may be divided into theplurality of semiconductor chips 10. At least one of the semiconductorchips 10 may be packaged. Alternatively, the wafer sawing process may beperformed using a laser.

Referring to FIG. 1M, at least one of the semiconductor chips 10 may bemounted on a printed circuit board 900 and the at least onesemiconductor chip 10 may be molded to form a semiconductor package 1.For example, more than one semiconductor chips 10 may be mounted on anupper surface of the printed circuit board 900 and then a mold layer 910may be formed using an insulator, such as, for example, epoxy moldingcompound (EMC). In the semiconductor package 1, the semiconductor chips10 may be flip-chip bonded so that the through electrodes 111 mayprovide electrical paths between the printed circuit board 900 and thesemiconductor chips 10 and/or between the semiconductor chips 10 ondifferent layers. An external terminal 920, such as solder ball, may beprovided on a lower surface of the printed circuit board 900.

FIGS. 2A to 2F are cross sectional views illustrating an example of amethod for processing a substrate, according to an embodiment of thepresent inventive concept. FIG. 2F is an enlarged view illustrating anexample of a portion of FIG. 2E.

Referring to FIG. 2A, the first glue layer 251, the release layer 210,and the second glue layer 252 may be sequentially formed on the activesurface 100 a of the wafer 100. According to an embodiment, athermosetting resin, for example, may be deposited on the first gluelayer 251 by a plasma enhanced chemical vapor deposition process andthen patterned to form the release layer 210. Due to the patterningstep, the release layer 210 may not cover an edge 100 e of the wafer100. The second glue layer 252 may be bonded to the first glue layer 251on the edge 100 e of the wafer 100. Alternatively, the second glue layer252 may be formed on the carrier 300 as illustrated in FIG. 1D. Inanother embodiment, the first sub-glue layer 252 a may be formed on thewafer 100 and the second sub-glue layer 252 b may be formed on thecarrier 300 as illustrated in FIG. 1E.

Referring to FIGS. 2B and 2C, the wafer 100 and the carrier 300 may bebonded together so that the upper surface 100 a of the wafer 100 mayface the upper surface 300 a of the carrier 300. Optionally, the firstand second glue layers 251 and 252 and the release layer 210 may bestrengthened by applying heat. According to an embodiment, the releaselayer 210 may be embedded within the glue layer 250, which includes thefirst glue layer 251 and the second glue layer 252, and the glue layer250 may be in contact with both the wafer 100 and the carrier 300 at theedges 100 e of the wafer 100. Therefore, the wafer 100 and the carrier300 may be firmly bonded together at the edge 100 e of the wafer 100.

Referring to FIG. 2D, the lower surface 100 b of the wafer 100 may bepolished, for example, by a chemical and/or mechanical polishing processto remove wafer material until the second lower surface 100 c isreached, a level at which the through electrodes 111 are not exposed.The through electrodes 111 may then be exposed by forming recesses inthe second lower surface 100 c using, for example, a dry etching processuntil the non-active surface 100 d is reached. The lower insulationlayer 107 may be formed on the non-active surface 100 d and the pads 115may be formed on the lower insulation layer 107 to be electricallyconnected to the through electrodes 111.

Referring to FIGS. 2E and 2F, the carrier 300 and the wafer 100 may beseparated from each other. The carrier 300 may be separated from thewafer 100 using protection tape 500 that adheres to the non-activesurface 100 d of the wafer 100. A side edge of the glue layer 250 may beremoved to form a recess region 420 that exposes the release layer 210,and the carrier 300 may be detached from the wafer 100 using the portionof the release layer 210 that is exposed. The second glue layer 252 maybe detached from the wafer 100 along with the carrier 300. The recessregion 420 may be formed, for example, by a physical or chemical method.

For example, the glue layer 250 may be chemically removed by an etchantcomprising at least one of diazabicycloundecene (DBU) andtetra-n-butylammonium fluoride (TBAF) that is mixed with a solvent, suchas acetate. The side edge of the glue layer 250 may be, for example,chemically etched to form the recess region 420. If the etching rate ofthe release layer 210 is faster than that of the glue layer 250, agroove 425 may be formed in the release layer 210. The groove 425 mayact as a crack so that the carrier 300 may be separated from the wafer100 more easily. Alternatively, a laser or a blade may be used to removethe side edge of the glue layer 250 to form the recess region 420.

Thereafter, as illustrated in FIG. 1K, the release layer 210 and thefirst glue layer 251 may be removed by supplying a cleaning solutionincluding, for example, at least one of diazabicycloundecene (DBU) andtetra-n-butylammonium fluoride (TBAF) that is mixed with a solvent, suchas acetate. The above mentioned processes may fabricate the thinnedwafer 100 that includes the through electrodes 111.

FIG. 3A to 3I are cross sectional views illustrating an example of amethod for processing a substrate, according to an embodiment of thepresent inventive concept. FIG. 3C is a cross sectional viewillustrating an example of a portion of FIG. 3B. FIG. 3F is a crosssectional view illustrating a modified example of FIG. 3E.

Referring to FIG. 3A, the first glue layer 251, a first release layer211, and the second glue layer 252 may be sequentially formed on theupper surface 100 a of the wafer 100. A third glue layer 253 and asecond release layer 212 may be sequentially formed on the upper surface300 a of the carrier 300. According to an embodiment, thermosettingresins, including, for example, siloxane-based material, may be appliedto form the first and second glue layers 251 and 252 on the wafer 100,and to form the third glue layer 253 on the carrier 300. By depositingand pattering thermosetting resins, the first release layer 211 may beformed on the first glue layer 251, and the second release layer 212 maybe formed on the third glue layer 253. The first and second releaselayers 211 and 212 may be formed in the same or in an analogous manneras the release layer 210 may be formed, as previously mentioned withreference to FIG. 1B. Alternatively, the first glue layer 251, the firstrelease layer 211, the second glue layer 252, the second release layer212, and the third glue layer 253 may all be sequentially formed on theupper surface 100 a of the wafer 100.

Referring to FIGS. 3B and 3C, the wafer 100 and the carrier 300 may bebonded together with each other. Optionally, the glue layers 251, 252,and 253, and the release layers 211 and 212 may be strengthened byapplying heat to improve heat-resistance and/or adhesion properties. Thefirst to third glue layers 251, 252, and 253 may be stacked to comprisethe glue layer 250. The first release layer 211 may be embedded betweenthe first and second glue layers 251 and 252, and the second releaselayer 212 may be embedded between the second and third glue layers 252and 253. The glue layer 250 and the release layers 211 and 212 maycomprise the bonding layer 200.

Referring to FIG. 3D, a chemical and/or mechanical polishing process,for example, may be performed on the lower surface 100 b of the wafer100 to remove wafer material until at least the second lower surface 100c is reached, a level at which the through electrodes 111 are notexposed. A dry etching process, for example, may then be performed onthe second lower surface 100 c to remove wafer material until at leastthe non-active surface 100 d is reached, a level at which the throughelectrodes 111 are exposed. Thereafter, the lower insulation layer 107may be formed to cover the non-active surface 100 d of the wafer 100,and the pads 115 may be formed on the lower insulation layer 107 to beelectrically connected to the through electrodes 111.

Referring to FIG. 3E, the carrier 300 may be separated from the wafer100. For example, the carrier 300 may be detached by a clamping toolcapable of grasping an end of the carrier 300. In this case, due to thesurface topology or roughness of the upper surface 100 a of the wafer100, the second release layer 212, unlike the first release layer 211,may be sacrificially destroyed so that the carrier 300 may be relativelyeasily separated from the wafer 100. When the carrier 300 is separated,the third glue layer 253 and a portion 212 a of the second release layer212 may also be separated from the wafer 100. Optionally, protectiontape 500 may be attached to the non-active surface 100 d of the wafer100 and the holder 510 may be used to hold the wafer 100 stable when thecarrier 300 is separated from the wafer 100.

Alternatively, as illustrated in FIG. 3F, a crack 422 may be formed inthe second glue layer 252 to separate the carrier 300. The crack 422 maybe created by a physical method. For example, an initiator 400, such asa blade, may be used to impact the second glue layer 252 to create thecrack 422. When the carrier 300 is being detached from the wafer 100,the crack 422 may propagate, preferably through the second release layer212 in the shape of a straight line, rather than through the firstrelease layer 211 in the shape of a curved line. Due to the propagationof the crack 422, the carrier 300 may be detached from the wafer 100more easily.

Referring to FIG. 3G, the second release layer 212 may remain on thesecond glue layer 252 when the carrier 300 is separated from the wafer100. Having the second release layer 212 remain on the second glue layer252 may weaken a bonding force between a rolling tape (600 of FIG. 3H)and the second glue layer 252 so that the second glue layer 252 may notbe easily removed. According to an embodiment, a plasma treatment may beperformed to remove the second release layer 252. The plasma treatmentmay use a plasma gas including, for example, at least one of oxygen,nitrogen, and argon.

Referring to FIG. 3H, the second glue layer 252 may be removed. In anembodiment, the second glue layer 252 may adhere to rolling tape 600that is moved along the wafer 100 to remove the second glue layer 252.The first release layer 211 may facilitate the separation of the secondglue layer 252. Since the second release layer 212 on the second gluelayer 252 is already removed by the plasma treatment, as previouslymentioned with reference to FIG. 3G, the adhesive strength between therolling tape 600 and the second glue layer 252 may be strong enough forthe second glue layer 252 to be relatively easily separated from thewafer 100. The first release layer 211 may be separated along with withthe second glue layer 252 or may remain on the wafer 100. Alternatively,a portion of the first release layer 211 may be separated along withwith the second glue layer 252 while another portion of the firstrelease layer 211 may remain on the wafer 100.

Referring to FIG. 3I, the wafer 100 may be cleaned. For example, acleaning solution may be sprayed on the wafer 100 through sprayer 700 toremove the first release layer 211 and the first glue layer 251. Thecleaning solution may comprise, for example, at least one ofdiazabicycloundecene (DBU) and tetra-n-butylammonium fluoride (TBAF)that is mixed with a solvent, such as acetate. Alternatively, afterseparation of the carrier 300 from the second release layer 212, thecleaning solution may be sprayed on the wafer 100 to remove the firstand second release layers 211 and 212 and the first and second gluelayers 252 and 252.

FIG. 4A is a schematic block diagram illustrating an example of memorycards including at least one semiconductor apparatus, according to anembodiment of the present inventive concept. FIG. 4B is a schematicblock diagram illustrating an example of an information process systemincluding at least one semiconductor apparatus, according to anembodiment of the present inventive concept.

Referring to FIG. 4A, a semiconductor memory 1210 including at least oneof the semiconductor chips 10 and the semiconductor package 1, accordingto an embodiment of the inventive concept is applicable to a memory card1200. For example, the memory card 1200 may include a memory controller1220, which generally controls data exchange between a host 1230 and aflash memory device 1210. An SRAM 1221 is used as a working memory for aprocessing unit 1222. A host interface 1223 has the data exchangeprotocol of the host 1230 connected to the memory card 1200. An errorcorrection coding block 1224 detects and corrects errors of data thatare read from the multi-bit flash memory device 1210. A memory interface1225 interfaces the semiconductor memory device 1210, according to anexample embodiment. The processing unit 1222 generally controls dataexchange of the memory controller 1220.

Referring to FIG. 4B, an information processing system 1300 may includea memory system 1310 having at least one of the semiconductor chips 10and the semiconductor package 1, according an embodiment of theinventive concept. The information processing system 1300 may include,for example, a mobile device or a computer. For example, the informationprocessing system 1300 may include a modem 1320, a central processingunit 1330, RAM 1340, and a user interface 1350 electrically connected tothe memory system 1310 via a system bus 1360. The memory system 1310 mayinclude a memory 1311 and a memory controller 1312 and havesubstantially the same configuration, for example, as that of the memorycard 1200 in FIG. 4A. The memory system 1310 stores data processed bythe central processing unit 1330 or data input from the outside. Theinformation process system 1300 may be provided, for example, as amemory card, a semiconductor device disk, a camera image sensor, andother application chipsets.

According to an embodiment of the present inventive concept, the glue(250, 251, 252, and/or 253) and release (210, 211, and/or 212) layersare formed, for example, from thermosetting material so that the wafer100 and the carrier 300 may be bonded together with thermal stability.Therefore, the wafer 100 may be processed or worked in a hightemperature process with assurance that the wafer 100 is firmly bondedto the carrier 300. Moreover, the carrier 300 may be easily detachedfrom the wafer 300 when the thermosetting glue (250, 251, 252, and/or253) and release (210, 211, and/or 212) layers are used. Also, thepresent inventive concept may be applicable to the mass production ofsemiconductor apparatuses that include through electrodes 111 and thatare stable and of good quality.

Although a few embodiments of the present general inventive concept havebeen shown and described, it will be appreciated by those skilled in theart that changes may be made in these embodiments without departing fromthe principles and spirit of the general inventive concept, the scope ofwhich is defined in the appended claims and their equivalents.

What is claimed is:
 1. A method for processing a substrate, the methodcomprising: providing a bonding layer between the substrate and acarrier to bond the substrate to the carrier, the substrate and thecarrier respectively including surfaces facing to each other; processingthe substrate while the substrate is supported by the carrier; andremoving the bonding layer to separate the substrate from the carrier,wherein the bonding layer includes a thermosetting release layerprovided on the surface of the substrate and a thermosetting glue layerprovided on the surface of the carrier, and wherein the substratefurther includes a plurality of bumps on the surface thereof such thatthe thermosetting release layer has a curved shape extending along aprofile of the bumps.
 2. The method of claim 1, wherein a bonding forcebetween the thermosetting release layer and the thermosetting glue layeris less than a bonding force between the thermosetting glue layer andthe carrier.
 3. The method of claim 1, wherein the bumps roundly projectover the surface of the substrate and the thermosetting release layercontacts at least projected portions of the bumps.
 4. The method ofclaim 1, wherein the substrate further includes a plurality ofthrough-electrodes partially penetrating therethrough, wherein theprocessing the substrate comprises: recessing an opposite surface of thesubstrate to expose the through-electrodes through the recessed oppositesurface of the substrate; and forming a plurality of pads on therecessed opposite surface of the substrate, the pads electricallyconnected to the through-electrodes.
 5. The method of claim 1, whereinthe removing the bonding layer comprises: separating the carrier and thethermosetting glue layer from the substrate; and providing a cleaningsolution onto the substrate to remove the thermosetting release layertherefrom.
 6. The method of claim 5, wherein the cleaning solutioncomprises acetate mixed with at least one of diazabicycloundecene (DBU)and tetra-n-butylammonium fluoride (TBAF).
 7. The method of claim 1,after the proving the bonding layer, further comprising providing heatto the bonding layer.
 8. The method of claim 7, wherein the providingheat to the bonding layer comprises baking the bonding layer tostrengthen the thermosetting glue layer and the thermosetting releaselayer.
 9. The method of claim 1, wherein the providing the bonding layercomprises: providing a first thermosetting material on the surface ofthe substrate to form the thermosetting release layer; providing asecond thermosetting material on at least one of the thermosettingrelease layer and the surface of the carrier, wherein the firstthermosetting material is different from the second thermosettingmaterial.
 10. The method of claim 9, wherein the first thermosettingmaterial comprises at least one of polydimethylsiloxane (PDMS) andhexamethyldisiloxane (HMDSO), and the second thermosetting materialcomprises siloxane.
 11. The method of claim 1, wherein the providing thebonding layer comprises: providing a first thermosetting material on thesurface of the substrate to form the thermosetting release layer;patterning the thermosetting release layer to remove an edge thereoflocated at an edge of the substrate; and providing a secondthermosetting material, which is different from the first thermosettingmaterial, on at least one of the thermosetting release layer and thesurface of the carrier to form the thermosetting glue layer.
 12. Amethod for processing a substrate, the method comprising: providing asubstrate including a plurality of bumps on a first surface thereof;sequentially forming a thermosetting release layer and a firstthermosetting sub-glue layer on the first surface of the substrate, thethermosetting release layer having a curved shape extending along aprofile of the bumps; providing a second thermosetting sub-glue layer tothe thermosetting release layer between the substrate and a carrier tobond the substrate to the carrier; thinning the substrate while thesubstrate is supported by the carrier to produce a thinned substrate;separating the carrier and the second thermosetting sub-glue layer fromthe thermosetting release layer; and cleaning the thinned substrate toremove the thermosetting release layer and the first thermosettingsub-glue layer from the thinned substrate.
 13. The method of claim 12,wherein the thinning the substrate comprises recessing an oppositesecond surface of the substrate to produce the thinned substrate havingthe recessed second surface, wherein the substrate further comprises aplurality of through-electrodes extending from the first surface towardthe second surface, at least one of the through-electrodes being exposedthrough the recessed second surface of the thinned substrate.
 14. Themethod of claim 12, wherein the first and second thermosetting sub-gluelayers contact to each other to form a thermosetting glue layer betweenthe thermosetting release layer and the carrier while the substrate isboned to the carrier, wherein the thermosetting glue layer and thethermosetting release layer are combined together to create a bondinglayer interposed between the substrate and the carrier.
 15. The methodof claim 14, further comprising: performing a first bake process on thebonding layer at a low temperature insufficient to strengthen thethermosetting glue and release layers; and performing second bakeprocess on the bonding layer at a high temperature sufficient tostrengthen the first baked thermosetting glue and release layers. 16.The method of claim 12, wherein the substrate comprises a semiconductorwafer, and the carrier comprises one of a glass substrate and a materialidentical to that of the substrate.
 17. A method for processing asubstrate, the method comprising: forming a thermosetting release layeron the substrate, wherein the substrate includes a plurality of bumpsformed on a first surface on which the thermosetting release layer isformed such that the first surface of the substrate has rough topology;forming a thermosetting glue layer on a carrier, wherein the carrierincludes a surface, on which the thermosetting glue layer is formed,whose topology is smoother than that of the first surface of thesubstrate; bonding the substrate to the carrier; processing thesubstrate while the substrate is supported by the carrier; and removingthe carrier from the substrate.
 18. The method of claim 17, wherein theforming the thermosetting glue layer on the carrier comprises: forming afirst portion of the thermosetting glue layer on the carrier; andforming a second portion of the thermosetting glue layer on thethermosetting release layer.
 19. The method of claim 18, furthercomprising forming a second thermosetting release layer on the firstportion of the thermosetting glue layer formed on the carrier.
 20. Themethod of claim 17, further comprising cleaning the substrate to removethe thermosetting release layer from the first surface of the substrate.